Sulfur Hexafluoride

Air Liquide manufactures sulfur hexafluoride pure gas with purity up to 99.999% or as part of various specialty gas mixture with air or nitrogen. Sulfur hexafluoride is used in many applications, including dielectric, heat insulation and plasma etching in semiconductor manufacturing. Sulfur hexafluoride in a balance of nitrogen is an excellent trace gas for use with instruments dedicated to detection of minor components.

Related Supply Modes and Services

Air Liquide packages sulfur hexafluoride in a variety of high-pressure compressed gas cylinders, including lecture bottles and nonreturnable Mini-MixTM Transportables, depending on the grade of pure gas or mixture composition, and your application. Air Liquide offers a wide range of services to try and meet each customer's needs.